Actinix has designed and built custom lasers and diagnostic tools for a variety of photonics applications:
- Solid-state deep ultraviolet lasers
- Excimer laser beam diagnostics and line narrowing testing
- 193 nm photomask metrology tools
- Pulsed fiber lasers with optical parametric amplification
Below are some examples of systems we have developed.
VUV Laser System
The system shown to the right is a custom built VUV laser source that provided over 2 mJ at 188 nm. Using a fiber laser seed source, a pulsed Nd:Yag laser, an optical parametric amplifier and non-linear DUV/VUV generation crystals the system provided high energy, low jitter, one-nanosecond light pulses.